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pro vyhledávání: '"Yalu Hao"'
Autor:
Wenli Liu, Yujie Lu, Zeji Chen, Qianqian Jia, Junyuan Zhao, Bo Niu, Wei Wang, Yalu Hao, Yinfang Zhu, Jinling Yang, Fuhua Yang
Publikováno v:
Sensors, Vol 23, Iss 8, p 3808 (2023)
This work presents a silicon-based capacitively transduced width extensional mode (WEM) MEMS rectangular plate resonator with quality factor (Q) of over 10,000 at a frequency of greater than 1 GHz. The Q value, determined by various loss mechanisms,
Externí odkaz:
https://doaj.org/article/c08a62d7bcdb466889667e73d58ea1be
