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Publikováno v:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV.
In this paper we introduce a novel method of making micro-waveguides on silicon surface by the use of the Zone Refining Method. We produce the melting zone by a laser beam focused on the surface of a doped silicon slab to create a melting spot on its
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ff62c44884ccea00eaa507be80529091
https://doi.org/10.1117/12.2545949
https://doi.org/10.1117/12.2545949
