Zobrazeno 1 - 10
of 16
pro vyhledávání: '"Yabu Takayuki"'
Autor:
Ronse, Kurt G., Naulleau, Patrick P., Gargini, Paolo A., Itani, Toshiro, Hendrickx, Eric, Mizoguchi, Hakaru, Tomuro, Hiroaki, Nishimura, Yuichi, Hosoda, Hirokazu, Nakarai, Hiroaki, Abe, Tamotsu, Tanaka, Hiroshi, Watanabe, Yukio, Shiraishi, Yutaka, Yanagiga, Tatsuya, Soumagne, Georg, Iwamoto, Fumio, Nagai, Shinji, Ueno, Yoshifumi, Suganuma, Takashi, Niimi, Gouta, Yabu, Takayuki, Yamada, Tsuyoshi, Saitou, Takashi
Publikováno v:
Proceedings of SPIE; October 2021, Vol. 11854 Issue: 1 p118540K-118540K-18, 11735479p
Autor:
Itani, Toshiro, Gargini, Paolo A., Naulleau, Patrick P., Ronse, Kurt G., Takashima, Yuta, Ueno, Yoshifumi, Yabu, Takayuki, Hori, Tsukasa, Soumagne, Georg, Nagai, Shinji, Yanagida, Tatsuya, Shiraishi, Yutaka, Miyao, Kenichi, Hayashi, Hideyuki, Watanabe, Yukio, Abe, Tamotsu, Nakarai, Hiroaki, Saito, Takashi, Mizoguchi, Hakaru
Publikováno v:
Proceedings of SPIE; September 2019, Vol. 11147 Issue: 1 p111471M-111471M-13, 11035643p
Autor:
Hiroshi Komori, Kouji Kakizaki, Masaki Nakano, Georg Soumagne, Krzysztof M. Nowak, Youichi Sasaki, Yabu Takayuki, Yukio Watanabe, Yanagida Tatsuya, Toshihiro Nishisaka, Yoshifumi Ueno, Hitoshi Nagano, Tamotsu Abe, Takeshi Asayama, Hiroshi Someya, Osamu Wakabayashi, Takashi Suganuma, Takanobu Ishihara, Masato Moriya, Hakaru Mizoguchi, Akira Sumitani, Akira Endo, Shinji Nagai, Hideo Hoshino
Publikováno v:
Alternative Lithographic Technologies.
We are developing a CO 2 laser driven Tin plasma EUV source for HVM EUVL. This approach enables cost-effective EUV power scaling by high-conversion efficiency and full recovery of Tin fuel. The RF-excited, multi 10 kW average power pulsed CO 2 laser
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4c89d0449fd5a9b19adebd368ce28abb
https://doi.org/10.1117/12.813639
https://doi.org/10.1117/12.813639
Autor:
Ronse, Kurt G., Hendrickx, Eric, Naulleau, Patrick P., Gargini, Paolo A., Itani, Toshiro, Nishimura, Yuichi, Hori, Tsukasa, Yabu, Takayuki, Wakana, Katsuhiko, Ueno, Yoshifumi, Soumagne, Georg, Nagai, Shinji, Yanagida, Tatsuya, Kawasuji, Yasufumi, Shiraishi, Yutaka, Abe, Tamotsu, Nakarai, Hiroaki, Saito, Takashi, Mizoguchi, Hakaru
Publikováno v:
Proceedings of SPIE; October 2018, Vol. 10809 Issue: 1 p108091M-108091M-11, 10701021p
Autor:
Gargini, Paolo A., Naulleau, Patrick P., Ronse, Kurt G., Itani, Toshiro, Yabu, Takayuki, Kawasuji, Yasufumi, Hori, Tsukasa, Okamoto, Takeshi, Tanaka, Hiroshi, Miyao, Kenichi, Ishii, Takuya, Watanabe, Yukio, Yanagida, Tatsuya, Shiraishi, Yutaka, Abe, Tamotsu, Kodama, Takeshi, Nakarai, Hiroaki, Yamazaki, Taku, Itou, Noritoshi, Saito, Takashi, Mizoguchi, Hakaru
Publikováno v:
Proceedings of SPIE; October 2017, Vol. 10450 Issue: 1 p104501C-104501C-12, 10345612p
Autor:
Ueno, Yoshifumi, Soumagne, Georg, Suganuma, Takashi, Yabu, Takayuki, Moriya, Masato, Komori, Hiroshi, Abe, Tamotsu, Endo, Akira, Sumitani, Akira
Publikováno v:
Proceedings of SPIE; Nov2008 Part 2, Issue 1, p70052U-70052U-9, 9p
Autor:
Endo, Akira, Hoshino, Hideo, Suganuma, Takashi, Nowak, Krzysztof, Yanagida, Tatsuya, Yabu, Takayuki, Asayama, Takeshi, Ueno, Yoshifumi, Moriya, Masato, Nakano, Masaki, Someya, Hiroshi, Nishisaka, Toshihiro, Abe, Tamotsu, Soumagne, Georg, Komori, Hiroshi, Mizoguchi, Hakaru, Sumitani, Akira, Toyoda, Koichi
Publikováno v:
Proceedings of SPIE; Nov2008, Issue 1, p69210T-69210T-7, 7p
Autor:
Nakano, Masaki, Yabu, Takayuki, Someya, Hiroshi, Abe, Tamotsu, Soumagne, Georg, Endo, Akira, Sumitani, Akira
Publikováno v:
Proceedings of SPIE; Nov2008, Issue 1, p692130-692130-8, 8p
Autor:
Abe, Tamotsu, Suganuma, Takashi, Moriya, Masato, Yabu, Takayuki, Asayama, Takeshi, Someya, Hiroshi, Ueno, Yoshifumi, Soumagne, Georg, Sumitani, Akira, Mizoguchi, Hakaru
Publikováno v:
Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65173C-65173C-8, 8p
Autor:
Hori, Tsukasa, Yabu, Takayuki, Ishihara, Takanobu, Watanabe, Takayuki, Wakabayashi, Osamu, Sumitani, Akira, Kakizaki, Kouji, Mizoguchi, Hakaru
Publikováno v:
Proceedings of SPIE; Nov2005, Issue 1, p1285-1292, 8p