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pro vyhledávání: '"Y. U. Ovsyannikov"'
Autor:
Y. U. Ovsyannikov, S. D. Kiyashko, Alexander M. Kamuz, Pavel F. Oleksenko, Oksana N. Stril'chuk
Publikováno v:
Nanofabrication Technologies and Device Integration.
The new technology for making the elements and devices of semiconductor integrated optics is presented. We report about creation in the planar diffusion CdSSe-waveguides such integrated optical elements as the channel waveguides, diffractive gratings
Publikováno v:
Scopus-Elsevier
semiconductors subsurface region.The experiments have been carried out on the Il-VI (CdS,CdTe) and 111-V (GaAs) semiconductor monocrystals.We have shown, that during the photostimulated process the enriching of cadmium is occured in subsurface region
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::064f7d9320ae6fac56029559c0f2af13
http://www.scopus.com/inward/record.url?eid=2-s2.0-0029454194&partnerID=MN8TOARS
http://www.scopus.com/inward/record.url?eid=2-s2.0-0029454194&partnerID=MN8TOARS