Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Y. J. Mergler"'
Publikováno v:
ACS Symposium Series ISBN: 9780841231504
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::40cb741379558d9dfb023a33423d0cec
https://doi.org/10.1021/bk-1995-0587.ch015
https://doi.org/10.1021/bk-1995-0587.ch015
Publikováno v:
Japanese Journal of Applied Physics. 38:5805
Boron vapour-phase doping (VPD) has been investigated as a possible processing tool for defect-free applications in shallow, vertical and deep junctions in devices. From literature and experiments it has become clear that silicon boride (SiB3) layers
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5cd4bbaec557f04feea6fe9e8b4738c4
https://doi.org/10.1143/jjap.38.5805
https://doi.org/10.1143/jjap.38.5805
Autor:
Y. J. Mergler, R. P. Schaake
Publikováno v:
Journal of Applied Polymer Science; May2004, Vol. 92 Issue 4, p2689-2692, 4p
Autor:
UMIT S. OZKAN, SANJAY K. AGARWAL, GEORGE MARCELIN, Carmo J. Pereira, Michael D. Amiridis, Doug Grano, M. D. Amiridis, B. K. Na, E. I. Ko, E. Hums, G. W. Spitznagel, R. Gopalakrishnan, C. H. Bartholomew, Xiankuan Zhang, Arden B. Walters, M. Albert Vannice, Benjamin W.-L. Jang, James J. Spivey, Mayfair C. Kung, Barry Yang, Harold H. Kung, Kathleen Bethke, David Alt, H. Yasuda, T. Miyamoto, M. Misono, Katsunori Yogo, Takashi Ono, Masaru Ogura, Eiichi Kikuchi, Yanping Zhang, Tao Sun, Adel F. Sarofim, Maria Flytzani-Stephanopoulos, Di-Jia Liu, Heinz J. Robota, L. P. Haack, C. P. Hubbard, M. Shelef, Steven S. C. Chuang, Raja Krishnamurthy, Girish Srinivas, Y. J. Mergler, A. van Aalst, B. E. Nieuwenhuys, A. M. Rubel, M. L. Stewart, J. M. Stencel, M. Linda Lin, Joseph R. Comparato, William H. Sun