Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Y. F. Nasedkin"'
Autor:
A. A. Serov, V. M. Atamanov, G. B. Levadny, N. N. Timchenko, M. Maass, U. V. Sereda, A. A. Ivanov, S. Klagge, Y. F. Nasedkin
Publikováno v:
Beiträge aus der Plasmaphysik. 22:427-434
The efficiency of energy dissipation caused by the mechanism of turbulent plasma heating from a tube-like electron beam in a electronegative gas is measured calorimetrically. Amorphous Si-layers are deposited from a SiH4/Ar discharge both on conducti
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::52d865940ba6879cf73b14ff11d3721d
https://doi.org/10.1002/ctpp.19820220505
https://doi.org/10.1002/ctpp.19820220505
Autor:
A. A. Ivanov, G. B. Levadny, Y. F. Nasedkin, V. M. Atamanov, N. N. Timchenko, A. A. Serov, Y. V. Sereda
Publikováno v:
Beiträge aus der Plasmaphysik. 22:509-515
Investigations on the device with a tube-like electron beam have been carried out. The behaviour of the plasma-beam discharge in active molecular gases at low pressures and at the pressure P = 1 Torr has been studied. The etching of crystalline silic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::039e4dd1c4213262163c8fd305068bdb
https://doi.org/10.1002/ctpp.19820220607
https://doi.org/10.1002/ctpp.19820220607