Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Y V Panfilov"'
Publikováno v:
Journal of Physics: Conference Series. 2059:012017
Thin film materials particles creation pulsed methods such as magnetron sputtering HiPIMS, pulsed laser deposition PLD, vacuum arc pulsed discharge, high-intensity pulsed ion beam impact HIPIB, as well, were described. It was shown that the stream of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::307ff0e14f9206d85580a387e53bd15e
https://doi.org/10.1088/1742-6596/2059/1/012017
https://doi.org/10.1088/1742-6596/2059/1/012017
Autor:
A V Gurov, Y V Panfilov
Publikováno v:
Journal of Physics: Conference Series. 1954:012035
The most known methods of pulsed thin film deposition such as magnetron sputtering HIPIMS, pulsed laser deposition PLD, vacuum arc pulsed deposition, high-intensity pulsed ion beams deposition HIPIB, as well, were described and analysed. It was shown
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::633798a756f1ae8dba249d786676f5ba
https://doi.org/10.1088/1742-6596/1954/1/012035
https://doi.org/10.1088/1742-6596/1954/1/012035
Autor:
Y V Panfilov
Publikováno v:
IOP Conference Series: Materials Science and Engineering. 387:012057
Virtual experiment method which consists of acquisition, systematization, and analysis of large experimental results of thin film deposition technology is described. The data base examples and thin film deposition of any materials result analysis are
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a09ed17183845122e82030a7d1820c52
https://doi.org/10.1088/1757-899x/387/1/012057
https://doi.org/10.1088/1757-899x/387/1/012057
Publikováno v:
Journal of Physics: Conference Series. 872:012010
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::908b9e50f10a91f34b2b49a7db56f1df
https://doi.org/10.1088/1742-6596/872/1/012010
https://doi.org/10.1088/1742-6596/872/1/012010
Autor:
Y. V. Panfilov, L. I. Volchkevich
Publikováno v:
Manufacturing Technologies for Machines of the Future ISBN: 9783642628221
Electronic vacuum technology (ET) is an engineering field in which material processing is based on the flow of high-energy particles (e.g., electrons, ions, atoms, and molecules). ET is also known as “electron-ion- plasma technologies” and “eli
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c2669394de13e7dcd87e922d2d13d077
https://doi.org/10.1007/978-3-642-55776-7_14
https://doi.org/10.1007/978-3-642-55776-7_14
Publikováno v:
Journal of Physics: Conference Series; 2019, Vol. 1313 Issue 1, p1-1, 1p
Publikováno v:
Journal of Physics: Conference Series; 2017, Vol. 872 Issue 1, p1-1, 1p