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pro vyhledávání: '"Xue-Li Tseng"'
Autor:
Wei-Yu Zhou, Hsuan-Fan Chen, Xue-Li Tseng, Hsiao-Han Lo, Peter J. Wang, Ming-Yu Jiang, Yiin-Kuen Fuh, Tomi T. Li
Publikováno v:
Materials, Vol 16, Iss 8, p 3015 (2023)
In the present study, the sputtered aluminum nitride (AlN) films were processed in a reactive pulsed DC magnetron system. We applied a total of 15 different design of experiments (DOEs) on DC pulsed parameters (reverse voltage, pulse frequency, and d
Externí odkaz:
https://doaj.org/article/b20736b9367e4b059d37515e64bf935f