Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Xue Chuan Shan"'
Publikováno v:
Journal of The Surface Finishing Society of Japan. 54:655-659
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d63c83db47718f7fe0e3c029dd7eecbe
https://doi.org/10.4139/sfj.54.655
https://doi.org/10.4139/sfj.54.655
Publikováno v:
SPIE Proceedings.
High-temperature and high-pressure connection between micro combustor and macro world for feeding of air/fuel gas is required in PowerMEMS development. A Kovar tubing-Glass-Si sealing process has been developed for an on-going PowerMEMS project to co
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aa0a11bc1bd696bde1a46a6b16fbe07b
https://doi.org/10.1117/12.667859
https://doi.org/10.1117/12.667859
Publikováno v:
SPIE Proceedings.
This paper reports on design, fabrication and characterisation of a MEMS-based micro combustor for micro power generation systems. The first micro combustor implemented was a static gas turbine engine. The micro combustor was composed of seven silico
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1a1b6c68d39b8c8214487405008ce9ae
https://doi.org/10.1117/12.580783
https://doi.org/10.1117/12.580783
Publikováno v:
SPIE Proceedings.
As part of an effort to develop MEMS-based power generation system, an assembly solution for combustion test of a recent-developed micro combustion device micromachined from single crystal silicon were proposed. In order to supply hydrogen/air to inl
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7cdefda586f0b02198aebbf67a65d289
https://doi.org/10.1117/12.588962
https://doi.org/10.1117/12.588962
Publikováno v:
Advances in Electronic Packaging, Parts A, B, and C.
A 2D optical switch system using two ball lenses as a collimator was theoretically analyzed with the objective of minimizing optical insertion loss. The lens diameters, lens material, path length, and alignment tolerance were optimized for use with s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d41f8f59dd000688a245de3ddb8890cf
https://doi.org/10.1115/ipack2005-73335
https://doi.org/10.1115/ipack2005-73335
Publikováno v:
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003..
Development of low cost manufacturing processes for the MEMS and the MOEMS is important for their commercialization. A micro hot embossing process is used to make optical and Bio devices with Polycarbonate (PC) and Polymethylmetacrylate (PMMA) materi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::77bc4312645cd7a9505c892f5a17f5d2
https://doi.org/10.1109/dtip.2003.1287058
https://doi.org/10.1109/dtip.2003.1287058
Micro hot embossing for high-aspect-ratio structure with materials flow enhancement by polymer sheet
Publikováno v:
SPIE Proceedings.
Nano imprinting or Nano embossing process have been introduced to fabricate semiconductor, optical device and Micro Electro Mechanical Systems (MEMS) and the Nano Electro Mechanical Systems (NEMS) to reduce the fabrication cost. In our previous paper
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8505bb39adbb1fcca4d4254021d795d3
https://doi.org/10.1117/12.522898
https://doi.org/10.1117/12.522898
Autor:
Weremczuk, J., Plotczyk, K., Tarapata, G., Jachowicz, R., Xue Chuan Shan, Shi, C.W.P., Hon Tat Hui
Publikováno v:
2009 IEEE Instrumentation & Measurement Technology Conference; 2009, p1290-1293, 4p
Publikováno v:
Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS 2003; 2003, p304-311, 8p