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pro vyhledávání: '"Xuan Yang Wang"'
Publikováno v:
Key Engineering Materials. :86-91
During making the surface acoustic wave devices and integrated circuit hybrid integrated electronics, it needs to put the piezoelectric crystal and silicon wafer bonding together. By selecting a certain wavelengths of UV curing adhesive, then exposin
Publikováno v:
Key Engineering Materials. :163-168
Polyimide is often used as a sacrificial layer material to make floating structure. Polyimide is also divided into photosensitive and non-photosensitive type; photosensitive polyimide currently has more negative photoresist and poor performance in ma