Zobrazeno 1 - 10
of 179
pro vyhledávání: '"Xiuguo Chen"'
Autor:
Jiamin Liu, Jinlong Zhu, Zhe Yu, Xianrui Feng, Zedi Li, Lei Zhong, Jinsong Zhang, Honggang Gu, Xiuguo Chen, Hao Jiang, Shiyuan Liu
Publikováno v:
International Journal of Extreme Manufacturing, Vol 7, Iss 1, p 015601 (2024)
In integrated circuit (IC) manufacturing, fast, nondestructive, and precise detection of defects in patterned wafers, realized by bright-field microscopy, is one of the critical factors for ensuring the final performance and yields of chips. With the
Externí odkaz:
https://doaj.org/article/e665f2004f634ebd80fc25d4220811ac
Publikováno v:
AIP Advances, Vol 10, Iss 10, Pp 105203-105203-8 (2020)
The shock etalon method with normal incidence is an effective method to extract the shocked dynamic parameters of transparent materials. In order to eliminate the sample surface reflection, additional efforts on the sample preparation are usually int
Externí odkaz:
https://doaj.org/article/a4bcaea0a29b4ea997f09a0aa6d6cc3c
Publikováno v:
Applied Sciences, Vol 10, Iss 5, p 1584 (2020)
Spatial chirp induced by the misaligned gratings and mirrors in a parallel grating pair pulse stretcher can significantly affect the performance of the output pulses. Firstly, a detailed analysis about the spatial chirp of the stretched pulses caused
Externí odkaz:
https://doaj.org/article/8fb70e6f2fb5480098c445d294d77d1f
Publikováno v:
Applied Sciences, Vol 9, Iss 19, p 4091 (2019)
Optical scatterometry is known as a powerful tool for nanostructure reconstruction due to its advantages of being non-contact, non-destructive, low cost, and easy to integrate. As a typical model-based method, it usually makes use of abundant measure
Externí odkaz:
https://doaj.org/article/46ba07d4bfbb45f6874c6348acff7a77
Publikováno v:
Applied Sciences, Vol 9, Iss 4, p 698 (2019)
Volume grating is a key optical component due to its comprehensive applications. Other than the common grating structures, volume grating is essentially a predesigned refractive index distribution recorded in materials, which raises the challenges of
Externí odkaz:
https://doaj.org/article/0710b1a3d8da4834b5810ad4f04aafbe
Publikováno v:
Applied Sciences, Vol 8, Iss 12, p 2583 (2018)
The development of necessary instrumentation and metrology at the nanoscale, especially fast, low-cost, and nondestructive metrology techniques, is of great significance for the realization of reliable and repeatable nanomanufacturing. In this work,
Externí odkaz:
https://doaj.org/article/1bd1e7cc7b894e2e9ebe0bf6a5720698
Publikováno v:
Applied Sciences, Vol 8, Iss 12, p 2539 (2018)
Form errors of a planar scale grating, such as pitch deviations and out-of-flatness, are major contributors to the final measurement uncertainty of an interferential scanning-type planar encoder. Following the previous work, in which a method has bee
Externí odkaz:
https://doaj.org/article/d453c3c46dcd44ba876f27bda69fd7c8
Autor:
Yuki Shimizu, Satoshi Kataoka, Tatsuya Ishikawa, Yuan-Liu Chen, Xiuguo Chen, Hiraku Matsukuma, Wei Gao
Publikováno v:
Sensors, Vol 18, Iss 2, p 398 (2018)
In this paper a new concept of a liquid-surface-based three-axis inclination sensor for evaluation of angular error motion of a precision linear slide, which is often used in the field of precision engineering such as ultra-precision machine tools, c
Externí odkaz:
https://doaj.org/article/c78f3bb7e4834b9ba8e0367b79efacce
Publikováno v:
Journal of Applied Crystallography. 56:167-177
An analytical and general form factor for any polyhedron is derived on the basis of a projection method, in terms of the vertex coordinates and topology of the polyhedron. An integral over the polyhedron equals the sum of the signed integrals over a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::964ead63af0b5c587c088727a1bc97a0
https://doi.org/10.1107/s160057672201130x
https://doi.org/10.1107/s160057672201130x
Publikováno v:
Science China Technological Sciences. 65:2007-2030
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::654e7d375bd6e0e6a3d2cc0c3bf68597
https://doi.org/10.1007/s11431-022-2090-4
https://doi.org/10.1007/s11431-022-2090-4