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pro vyhledávání: '"Xinghui Qin"'
Publikováno v:
Micromachines, Vol 14, Iss 9, p 1800 (2023)
Hafnium oxide thin films have attracted great attention as promising materials for applications in the field of optical thin films and microelectronic devices. In this paper, hafnium oxide thin films were prepared via DC magnetron sputtering depositi
Externí odkaz:
https://doaj.org/article/a4f9fc42cc6f421097ebfa2277fa1023