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pro vyhledávání: '"Xiang‐shu Lei"'
Publikováno v:
The Canadian Journal of Chemical Engineering. 100:202-220
Publikováno v:
Journal of Thermal Analysis and Calorimetry. 141:323-335
Polysilicon, the crucial material of photovoltaic field, is commonly produced in a Siemens chemical vapor deposition (CVD) reactor with a complex physical and chemical phenomenon included inside as well as complicated geometry structure. In order to