Thermal and electrostatic reliability characterization in RF MEMS switches

Autor: Francis Pressecq, Petra Schmitt, Xavier Lafontan, F. Flourens, Lionel Buchaillot, Patrick Pons, Dominique Collard, Q.H. Duong

Publikováno v: Microelectronics Reliability
Microelectronics Reliability, 2005, 45, pp.1790-1793
Microelectronics Reliability, Elsevier, 2005, 45, pp.1790-1793

The reliability of RF MEMS switches is closely linked to their operational and environmental conditions. This paper examines the reliability of five different capacitive switch designs by a combined use of modeling and experimental tools. Three-dimen

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b2f481c5fa52fea6525f216073af9b32
https://doi.org/10.1016/j.microrel.2005.07.095

The advent of MEMS in space

Autor: J.-L. Roux, Francis Pressecq, C. Le-Touze, J. Kuchenbecker, Muriel Dardalhon, Djemel Lellouchi, B. Baradat, Felix Beaudoin, Xavier Lafontan, Sebastien Rigo, Jean Marc Nicot, Petra Schmitt

Publikováno v: Microelectronics Reliability. 43:1061-1083

An overview of the MEMS activity at the French Space Agency (CNES) is presented. At present, MEMS are in the introduction phase and failure analysis and quality assurance (FA/QA) activities are underway for a large variety of MEMS technologies. This

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::c149eb711f0faf1046ad174e9eeb1af2
https://doi.org/10.1016/s0026-2714(03)00120-3

Monitoring of particle deposition in cleanrooms: State-of-the-art

Autor: Djemel Lellouchi, Nina Menant, Pascal Nouet, Delphine Faye, Xavier Lafontan

Publikováno v: 16th Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS
DTIP: Design, Test, Integration and Packaging
DTIP: Design, Test, Integration and Packaging, Apr 2014, Cannes, France. pp.368-371, ⟨10.1109/DTIP.2014.7056699⟩

International audience; Cleanrooms are classified by the cleanliness of air and surface. Classification defined by ISO 14644-1 and 14644-9 is given by the number of particle larger than a critical size in a quantity of volume or surface. No reliable

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::55fd6cbbbf0271bf2826b292ff4989ea
https://doi.org/10.1109/dtip.2014.7056699

Influence of microstructure and internal stress on the mechanical behavior of electroplated gold freestanding thin films

Autor: Thibaut Fourcade, P. Martins, Xavier Lafontan, Jean-Michel Desmarres, C. Malhaire, Cedric Seguineau, J. Martegoutte

Publikováno v: EPJ Web of Conferences, Vol 6, p 26009 (2010)
EPJ Web of Conferences
EPJ Web of Conferences, EDP Sciences, 2010, 6, pp.26009

Mechanical properties of freestanding electroplated gold thin films were studied in relationship to their geometrical and microstructural properties. Three different techniques of characterization were used: nanoindentation, bulge tests and microte

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d6c6471a0b6cba624416a811eb7f5c95
https://doaj.org/article/7fe08c506d5141c0af0a1bc84148bc96

Characterization of Au/Au, Au/Ru and Ru/Ru ohmic contacts in MEMS switches improved by a novel methodology

Autor: Adrien Broué, Frédéric Courtade, Je´re´mie Dhennin, Robert Plana, Christel Dieppedale, Xavier Lafontan, Patrick Pons

Publikováno v: Journal of Micro/Nanolithography, MEMS, and MOEMS
Journal of Micro/Nanolithography, MEMS, and MOEMS, Society of Photo-optical Instrumentation Engineers, 2010, 9 (4), pp.041102-1 / 041102-8
Journal of Micro/Nanolithography, MEMS, and MOEMS, 2010, 9 (4), pp.041102-1 / 041102-8

International audience; Comparisons between several pairs of contact materials are done with a new methodology using a commercial nanoindenter coupled with electrical measurements on test vehicles specially designed to investigate microscale contact

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f944aeb771d45921d5ede69158c18a3b
https://hal.archives-ouvertes.fr/hal-00624780