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Improvement of LiNbO 3 Surface Roughness by Using a Multi-Step Process: Relationship Between Optical and AFM Analysis

Autor: Elhadj Dogheche, Denis Remiens, X. Lansiaux

Publikováno v: Integrated Ferroelectrics. 49:211-219

In this study, we present the results on the growth of lithium niobate (LiNbO 3 ) films on sapphire with good crystalline quality and morphology. Various transfer function were defined for the epitaxial deposition of LiNbO 3 . In order to overcome th

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::87745512109ed5a245279173adb33ad3
https://doi.org/10.1080/10584580215484

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Growth and optical waveguiding properties of rf sputtered lithium niobate thin films on sapphire substrates

Autor: Denis Remiens, Elhadj Dogheche, X. Lansiaux

Publikováno v: Integrated Ferroelectrics. 25:47-59

Thin films of lithium niobate have been grown in-situ by radiofrequency magnetron sputtering on (0001) sapphire substrates. The epitaxial quality has been studied as a function of deposition parameters. The films prepared under optimized conditions,

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::9f1865eb269c9d237053a7f58cea1d48
https://doi.org/10.1080/10584589908210159

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PbTiO3 epitaxial thin films as optical waveguides

Autor: X. Lansiaux, Elhadj Dogheche, Denis Remiens, B. Jaber

Publikováno v: Le Journal de Physique IV. :Pr9-277

Thin films of lead titanate (PbTiO 3 -PT) have been prepared in-situ on SrTiO 3 (100) substrates using radio-frequency sputtering. The epitaxial quality of the films has been investigated as a function of the substrate temperature. Stoichiometric fil

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::0ed184d7cd6150f01f16dcdf9ad00a6f
https://doi.org/10.1051/jp4:1998955

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Growth Process and Surface Acoustic Wave Characteristics of LiNbO3/Diamond/Silicon Multilayered Structures

Autor: Tadeusz Gryba, X. Lansiaux, Elhadj Dogheche, Denis Remiens, Véronique Sadaune, Stéphanie Chauvin

Publikováno v: Japanese Journal of Applied Physics. 42:572-574

Lithium niobate (LiNbO3) films have been grown at 490°C on diamond-coated silicon substrates by radio-frequency magnetron sputtering. A multi-step process was developed to produce thick layers on diamond with a good structure and a smooth morphology

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::0c8617572150ca6e5d8e104dfc76454b
https://doi.org/10.1143/jjap.42.572

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Thick LiNbO3 layers on diamond-coated silicon for surface acoustic wave filters

Autor: Denis Remiens, Véronique Sadaune, X. Lansiaux, Elhadj Dogheche, Tadeusz Gryba

Publikováno v: Applied Physics Letters. 81:1329-1331

Surface acoustic wave (SAW) technology based on lithium niobate/diamond/silicon multilayered structures has been investigated due to the large demand of frequency filters for communication systems, particularly for cellular phones. Thick LiNbO3 layer

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::ea4e8b593dcd0b0f560da9a65f35932e
https://doi.org/10.1063/1.1501156

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M-line spectroscopy for optical analysis of thick LiNbO3 layers grown on sapphire substrates by radio-frequency multistep sputtering

Autor: X. Lansiaux, Denis Remiens, Elhadj Dogheche

Publikováno v: Journal of Applied Physics
Journal of Applied Physics, American Institute of Physics, 2003, 93, pp.1165-1168
Journal of Applied Physics, 2003, 93 (2), pp.1165-1168. ⟨10.1063/1.1530367⟩

Thick films of lithium niobate (LiNbO3) have been epitaxially grown on sapphire substrates by multistep radio-frequency magnetron sputtering. We have investigated the optical properties of the deposited layers by the m-line spectroscopy technique. Th

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::368cc6f695ea50ed9b2a6f3ba18a0db5
https://hal.archives-ouvertes.fr/hal-00146473

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LiNbO3 thick films grown on sapphire by using a multistep sputtering process

Autor: Maryline Guilloux-Viry, Denis Remiens, A. Perrin, P. Ruterana, X. Lansiaux, Elhadj Dogheche

Publikováno v: Journal of Applied Physics
Journal of Applied Physics, 2001, 90, pp.5274-5277
Journal of Applied Physics, American Institute of Physics, 2001, 90, pp.5274-5277

We present the results of investigations of lithium niobate (LiNbO3) films grown on (0001) sapphire substrate by radio-frequency magnetron sputtering. With the aim of producing thick films we have developed a multistep process. To assess the structur

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1793379ba82b9cc5d330d336c3946fcb
https://hal.science/hal-00152483

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Lithium niobate thick films grown by RF sputtering : correlation between optical analysis and transmission electron microscopy observations

Autor: Elhadj Dogheche, X. Lansiaux, Denis Remiens

Publikováno v: Integrated Ferroelectrics
Integrated Ferroelectrics, Taylor & Francis, 2000, 31, pp.105-116
Scopus-Elsevier
Integrated Ferroelectrics, 2000, 31, pp.105-116

We report on the low temperature process for depositing epitaxial LiNbO3 (0001) thick films on sapphire (0001) substrates by radio-frequency magnetron sputtering. To obtain this objective, we have developed a multi-steps process. Structural studies c

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::39ad0de25efd7fc992de18df9f960a58
https://hal.archives-ouvertes.fr/hal-00158553

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