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Autor:
Wyndaele PJ; Katholieke Universiteit Leuven, 3000 Leuven, Belgium.; imec, 3001 Heverlee, Belgium., de Marneffe JF; imec, 3001 Heverlee, Belgium., Slaets R; Katholieke Universiteit Leuven, 3000 Leuven, Belgium., Groven B; imec, 3001 Heverlee, Belgium., Franquet A; imec, 3001 Heverlee, Belgium., Brüner P; IONTOF GmbH, 48149 Münster, Germany., Grehl T; IONTOF GmbH, 48149 Münster, Germany., Gendt S; Katholieke Universiteit Leuven, 3000 Leuven, Belgium.; imec, 3001 Heverlee, Belgium.
Publikováno v:
Nanotechnology [Nanotechnology] 2024 Sep 03; Vol. 35 (47). Date of Electronic Publication: 2024 Sep 03.