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pro vyhledávání: '"Wyacheslaw Grimm"'
Autor:
Mikhail Ivanenko, Wyacheslaw Grimm, Vitalij Lissotschenko, Yuri V. Miklyaev, Klaus Bagschik, Alexei Mikhailov
Publikováno v:
SPIE Proceedings.
Advanced laser crystallization of Si films for large flat panel displays requires a narrow very homogeneous focus with at least 235 mm length and high depth of focus. Earlier we have reported on the development and application of an ultranarrow (5-9
Autor:
Wyacheslaw Grimm, Yuri V. Miklyaev, Andreas Hildebrandt, Vitalij Lissotschenko, Mikhail Ivanenko, Klaus Bagschik, Alexei Mikhailov
Publikováno v:
SPIE Proceedings.
Advanced laser crystallization of Si for flat panel displays demands a narrow line-shaped light focus with an ultimately high homogeneity. Key element of LIMO line shaping system is an anisotropic quality transformation of a multimode laser beam, whi