Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Wu Feng Deng"'
Publikováno v:
ECS Transactions. 60:619-623
W CMP process plays an important role to form the contact W plug. We had faced a severe issue of W plug recess during W CMP process. In this paper, a solution to above issue will be reported. Firstly, the characteristic and mechanism of W plug recess
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ce05f5e1309a7c4a0739c86fcdfafa38
https://doi.org/10.1149/06001.0619ecst
https://doi.org/10.1149/06001.0619ecst
Publikováno v:
Journal of Iron and Steel Research, International. 14:59-65
The oxidation behavior of a cast Ni 3 Al-base superalloy MX246A in air over the temperature range of 1000°C to 1200°C for period up to 100h has been studied. The results indicate that the average oxidation rate of MX246A containing 0.5Hf and 0.01 Y
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e007b58a530ef9270a954d2ed0e02a53
https://doi.org/10.1016/s1006-706x(08)60052-7
https://doi.org/10.1016/s1006-706x(08)60052-7