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pro vyhledávání: '"Woo-Lee Deug"'
Publikováno v:
Transactions of Nonferrous Metals Society of China. 21:s205-s209
A nano probe system which can measure precise micro parts or optical parts in nanometer range resolution and scratch contact force in mN scale was demonstrated. The nano probe was originally designed for on-machine measuring applications and one kind
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bb047fa592ebbe22bc200b9de98fec91
https://doi.org/10.1016/s1003-6326(11)61089-3
https://doi.org/10.1016/s1003-6326(11)61089-3
