Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Woo-Deok Joo"'
Autor:
Jiyong Park, Woo-Deok Joo, Seungman Kim, Seungchul Kim, Young-Jin Kim, Yunseok Kim, Seung-Woo Kim
Publikováno v:
International Journal of Precision Engineering and Manufacturing. 14:241-246
We report the use of a femtosecond pulse laser as an interferometric low-coherent light source for precision surface-profile metrology. Unequal-path non-symmetric low-coherence interferometer is configured to measure large-sized optics with a small r
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::78e49ef7158be4ec9717c7cbb86779b1
https://doi.org/10.1007/s12541-013-0033-y
https://doi.org/10.1007/s12541-013-0033-y
Publikováno v:
2015 11th Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR).
Femtosecond pulse lasers provide novel possibilities to high-precision optical profilometry for quality assurance of step-structures on 3D microelectronic products based on its time and frequency domain characteristics.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d4fa436694f35522a140760079c04b0c
https://doi.org/10.1109/cleopr.2015.7376011
https://doi.org/10.1109/cleopr.2015.7376011
Autor:
Joo-hyung Lee, Woo-Deok Joo, Jiyong Park, Seungman Kim, Young-Jin Kim, Seung-Woo Kim, Seungchul Kim, Keunwoo Lee
Publikováno v:
OPTICS EXPRESS(21): 13
Fast, precise 3-D measurement of discontinuous step-structures fabricated on microelectronic products is essential for quality assurance of semiconductor chips, flat panel displays, and photovoltaic cells. Optical surface profilers of low-coherence i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ed7d248a163462627accfd4972c14b13
http://open-repository.kisti.re.kr/cube/handle/open_repository/479015.do
http://open-repository.kisti.re.kr/cube/handle/open_repository/479015.do
Publikováno v:
SPIE Proceedings.
We report high-precision surface-profile metrology using a femtosecond pulse laser as a low-coherence interferometric light source. Unequal-path non-symmetric interferometer is configured to test a large-sized optics with a small reference mirror, wh
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b7705b63809bfbf48733a7c08efb6856
https://doi.org/10.1117/12.893278
https://doi.org/10.1117/12.893278
Publikováno v:
SPIE Proceedings.
The principle of angle-resolved reflectometry is exploited for thin-film thickness measurements. Within an optical microscope equipped with a high NA objective, a sequence of quasi-monochromatic light of different wavelengths is generated from a whit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::998da1aa50694710d2a75feb012823cd
https://doi.org/10.1117/12.797523
https://doi.org/10.1117/12.797523
Publikováno v:
Scopus-Elsevier
We present a fast and precise 3-D measurement of microelectronic step-structures over a wide field-of-view by utilizing high spatial coherence, low temporal coherence and repetition rate tunablility of femtosecond laser pulses
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::966c38f737b80dd4a6296846b5ca3169
http://www.scopus.com/inward/record.url?eid=2-s2.0-84944699487&partnerID=MN8TOARS
http://www.scopus.com/inward/record.url?eid=2-s2.0-84944699487&partnerID=MN8TOARS
Publikováno v:
2014 Conference on Lasers & Electro-Optics (CLEO) - Laser Science to Photonic Applications; 2014, p1-2, 2p