Zobrazeno 1 - 10
of 17
pro vyhledávání: '"Won Kyun Yang"'
Autor:
Junghoon Joo, Won-Kyun Yang
Publikováno v:
Applied Science and Convergence Technology. 23:139-144
GaN deposition equipment and processes for the fabrication of white LEDs (Light Emitting Diode) using MOCVD (Metal Organic Chemical Vapor Deposition) were numerically modeled to analyze the effects of a reactive gas introduction strategy. The source
Autor:
Junghoon Joo, Won-Kyun Yang
Publikováno v:
Current Applied Physics. 12:S99-S103
Aluminum-doped ZnO (AZO) films were deposited on a glass substrate of 400 mm × 400 mm area by bipolar pulse dc magnetron sputtering with various Ar flow rate. The working pressure was kept at 3 mTorr by controlling pumping speed (69–1564 l/s) duri
Autor:
Junghoon Joo, Won-Kyun Yang
Publikováno v:
Journal of the Korean institute of surface engineering. 45:53-60
Modulated Pulse Power (MPP) magnetron sputtering is a new high-power pulsed magnetron sputtering (HPPMS) technology which overcomes the low deposition rate problem by modulating the pulse voltage shape, amplitude, and the duration. Highly ionized mag
Publikováno v:
Vacuum. 86:1452-1457
Aluminum-doped zinc oxide films (ZnO:Al) were deposited on Si wafers and glass substrates by dc magnetron sputtering from a ZnO target mixed with 2 wt% Al 2 O 3 for photovoltaic films. The effect of base pressure, additional oxygen, and substrate tem
Publikováno v:
Journal of the Korean institute of surface engineering. 44:32-37
Numerical analysis is done to investigate the effect of surface treatment of a toilet on the cleanness. The surface treatment using plasma for the super-hydrophobic surface expects the self-cleaning effect of the toilet seat cover for preventing the
Publikováno v:
Journal of the Korean institute of surface engineering. 43:304-308
Deposition temperature uniformity of GaN based MQW (multiple quantum well) layers is an important key which affects the wavelength uniformity of white LEDs. Temperature uniformity was assessed by infrared images for both cases of a static and a rotat
Autor:
Junghoon Joo, Won-Kyun Yang
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 28:856-860
The Al-doped ZnO (AZO) thin films for a transparent conducting oxide in solar cell devices were deposited by bipolar pulsed dc magnetron sputtering. This work was performed in an in-line type system and investigated AZO films in a static deposition m
Autor:
Won-Kyun Yang, Junghoon Joo
Publikováno v:
Journal of the Korean Vacuum Society. 19:190-198
Asymmetric model for plasma uniformity by Ar and was modeled by the antenna structure, the diameter of chamber, and the distance between source and substrate for the development of plasma equipment for 450 mm wafer. The aspect ratio of chamber was di
Publikováno v:
Journal of the Korean Vacuum Society. 19:45-51
We measured the temperature of target surface inducing by various physical phenomenon on magnetron sputtering target and confirmed the possibilities if the temperature distribution could affect plasma and deposited thin film. The target of magnetron
Autor:
Junghoon Joo, Won-Kyun Yang
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 27:1310-1315
Bipolar pulsed magnetron sputtering is used to deposit Al doped ZnO (AZO) on a glass substrate for a transparent conducting oxide in a solar cell structure. A 5×25in.2 AZO target was sputtered by 50–250kHz bipolar pulsed dc power supply to deposit