Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Won, Seungjai"'
Publikováno v:
Nanophotonics, Vol 12, Iss 16, Pp 3373-3383 (2023)
The ultraviolet (UV) wavelength regime is attracting increasing attention because of its growing demand in semiconductor lithography, spectroscopy, and imaging applications owing to its high spatial resolution and high photon energy. However, beam sh
Externí odkaz:
https://doaj.org/article/30b27eb555464b0eb59d372048aa300c
Autor:
Schunemann, Peter G., Won, Seungjai, Kim, Taewon, Choi, Seungman, Kim, Byunggi, Kim, Seung-Woo, Lee, Joohyung, Kim, Young-Jin
Publikováno v:
Proceedings of SPIE; March 2024, Vol. 12869 Issue: 1 p128690L-128690L-4, 1158215p