Zobrazeno 1 - 10
of 37
pro vyhledávání: '"Wolfram Dötzel"'
Publikováno v:
Sensors and Actuators A: Physical. 156:59-65
This paper reports on the measurement unit of a micromechanical sensor–actuator system for adjustable frequency selective vibration detection in the frequency range below 1 kHz. The sensitivity of the micro-electro-mechanical system (MEMS) is tunab
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5aa8c24fca8a8b9061c0cbb16cff1cea
https://doi.org/10.1016/j.sna.2009.08.028
https://doi.org/10.1016/j.sna.2009.08.028
Publikováno v:
Sensors and Actuators A: Physical. :245-256
Micromechanical resonators for vibration sensing are typically limited to frequencies above 1 kHz [D. Scheibner, J. Mehner, D. Reuter, T. Gessner, W. Dotzel, A spectral vibration detection system based on tunable micromechanical resonators, Sens. Act
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3a6ec7d3737e16cbd41624cdc6d0e916
https://doi.org/10.1016/j.sna.2007.12.032
https://doi.org/10.1016/j.sna.2007.12.032
Autor:
Stefan Patzelt, Benjamin Viering, Christian Herbst, Albert Weckenmann, Sven Simon, Jochen Peters, Jan Mehner, Uwe Hilpert, Jörg Hoffmann, Alexey Shaporin, Philipp Krämer, Andreas Tausendfreund, Wolfram Dötzel, Ivesa Buchholz, Gert Goch, Jürgen Fleischer, Ulrich Neuschaefer-Rube, Rainer Tutsch
Publikováno v:
teme. 75:327-338
Die industrielle Produktion von mikro- und nanostrukturierten Bauteilen und Systemen erfordert die Entwicklung einer adäquaten Messtechnik zur Qualitätssicherung, da die Ist-Ausprägungen von Standardgeometrieelementen eine wesentliche Entscheidung
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::07cdb58c14fa41258bf12b4b16702cbe
https://doi.org/10.1524/teme.2008.0875
https://doi.org/10.1524/teme.2008.0875
Publikováno v:
Sensors and Actuators A: Physical. 142:166-172
This work describes a new vacuum gauge consisting of a micromechanical silicon torsion resonator with electrostatic actuation. The damping by the rarefied gas in between resonator plate and a nearby wall is used as a measure for the pressure. Capacit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9440cf749c9d632b42ad92711b23676e
https://doi.org/10.1016/j.sna.2007.05.031
https://doi.org/10.1016/j.sna.2007.05.031
Publikováno v:
Sensors and Actuators A: Physical. 142:276-283
Within this paper we present a new microsystem for frequency selective vibration monitoring in the frequency range below 1 kHz. The novel sensor is based on two force coupled oscillators, operating at standard pressure, which transform the low freque
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4f2c11f9a72f36f84d30939c62beda9c
https://doi.org/10.1016/j.sna.2007.04.004
https://doi.org/10.1016/j.sna.2007.04.004
Autor:
Danny Reuter, Detlef Billep, Wolfram Dötzel, S. Buschnakowski, Thomas Gessner, Andreas Bertz, Dirk Scheibner
Publikováno v:
Sensors and Actuators A: Physical. 126:211-217
This paper presents a MEMS fabrication technique for reducing the trench width of microstructures below the technological limitations of the deep reactive ion etching (DRIE) process, in order to increase the aspect ratio of the sensing electrode gap
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::99524e9e72d78d5f2a6b6c2a6b54d498
https://doi.org/10.1016/j.sna.2005.09.033
https://doi.org/10.1016/j.sna.2005.09.033
Publikováno v:
IEEE Sensors Journal. 5:1019-1026
This paper deals with the computer-aided generation of reduced-order macromodels (ROMs) for system level simulation using VHDL-AMS. The focus is thereby set on the application of ROMs in system simulation. It also gives an survey of our approach of r
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dc69fa8bef8834a2e6b4e278b1dbfcbc
https://doi.org/10.1109/jsen.2004.841445
https://doi.org/10.1109/jsen.2004.841445
Publikováno v:
Sensors and Actuators A: Physical. :476-482
The paper deals with a novel setup of a Hadamard transform spectrometer using a micro mirror array as encoding mask. In contrast to previously published papers, the mirrors of the array are driven at frequencies less than their resonant frequency and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f4861f628ddc4884e79b20d1fe9a6a77
https://doi.org/10.1016/j.sna.2005.03.043
https://doi.org/10.1016/j.sna.2005.03.043
Autor:
Wolfram Dötzel, Marian Hanf
Publikováno v:
Sensors and Actuators A: Physical. 115:280-285
Electrostatic driving and capacitive read-out play an important role in micro-electromechanical system (MEMS). The necessary electrodes are placed on insulating materials and in some cases they are coated with an insulating layer. It has been observe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::003d883a36bc09500754e82d0ce38584
https://doi.org/10.1016/j.sna.2004.03.070
https://doi.org/10.1016/j.sna.2004.03.070
Publikováno v:
Sensors and Actuators A: Physical. 111:93-99
In this paper, we present a measurement technique for the characterization and the self-test of Single Crystal Reactive Etching and Metallization (SCREAM)-fabricated tunable resonators. Such kinds of structures can be used for frequency selective vib
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e3fdbdd64169171c2edc04088cfafa06
https://doi.org/10.1016/j.sna.2003.10.010
https://doi.org/10.1016/j.sna.2003.10.010