Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Witman, David F."'
Autor:
Shaw, Jane M., Hatzakis, Michael, Babich, Edward D., Paraszczak, Jurij R., Witman, David F., Stewart, Kevin J.
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1989, Vol. 7 Issue 6, p1709-1716, 8p
Autor:
Witman, David F., Shaw, Jane M., Hatzakis, Michael, Babich, Edward D., Paraszczak, Jurij R., Stewart, Kevin J.
Publikováno v:
In Microelectronic Engineering 1990 11(1):549-552