Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Wing Wai Chung"'
Autor:
Sihao Wang, Veerendra Dhyani, Sakthi Sanjeev Mohanraj, Xiaodong Shi, Binni Varghese, Wing Wai Chung, Ding Huang, Zhi Shiuh Lim, Qibin Zeng, Huajun Liu, Xianshu Luo, Victor Leong, Nanxi Li, Di Zhu
Publikováno v:
APL Photonics, Vol 9, Iss 6, Pp 066109-066109-7 (2024)
Scandium aluminum nitride (ScAlN) has recently emerged as an attractive material for integrated photonics due to its favorable nonlinear optical properties and compatibility with complementary metal–oxide semiconductor (CMOS) fabrication. Despite t
Externí odkaz:
https://doaj.org/article/dde33a63ed3c43d8b120cb60abb13672
Autor:
Doris Keh Ting Ng, Linfang Xu, Yuan Hsing Fu, Weiguo Chen, Chong Pei Ho, Jia Sheng Goh, Wing Wai Chung, Norhanani Jaafar, Qingxin Zhang, Lennon Yao Ting Lee
Publikováno v:
Advanced Electronic Materials, Vol 9, Iss 8, Pp n/a-n/a (2023)
Abstract Gas sensors are useful for monitoring of greenhouse gases. As the move toward complementary metal‐oxide‐semiconductor (CMOS) compatible pyroelectric room temperature detectors is gaining traction due to its scalability to 8‐in./12‐in
Externí odkaz:
https://doaj.org/article/288cbda399624b56ba8e4befb754345c
Autor:
Wing-Wai Chung, Hong Cai, Jianbo Sun, Linfang Xu, Tan-Tan Zhang, Guoqiang Wu, Qingxin Zhang, Navab Singh, Doris K. T. Ng
Publikováno v:
Journal of Microelectromechanical Systems. 29:1199-1207
CMOS compatibility and 8-inch manufacturability have been highly desired in MEMS technology. In this article, we demonstrate a MEMS pyroelectric IR detector using CMOS compatible AlN and 8-inch semiconductor wafer technology. This AlN pyroelectric de