Zobrazeno 1 - 10
of 126
pro vyhledávání: '"William Scott Hobson"'
Publikováno v:
Handbook of Laser Technology and Applications ISBN: 9781003130123
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6625b4914e063a721cca023855ae1bde
https://doi.org/10.1201/9781003130123-27
https://doi.org/10.1201/9781003130123-27
Autor:
W. Chang, S.N.G. Chu, John Lopata, Stephen J. Pearton, G. T. Dang, William Scott Hobson, Fan Ren, B. Luo, Hongen Shen, M. Tayahi, R. Mehandru
Publikováno v:
Journal of Lightwave Technology. 21:1020-1031
Process technology of high-speed implant-apertured index-guide lateral-current-injection top dielectric-mirror quantum-well 850-nm vertical cavity surface-emitting lasers (VCSELs) has been developed. Oxygen and helium implantation for aperture defini
Autor:
John Lopata, B. Lou, Stephen J. Pearton, M. Tayahi, G. T. Dang, William Scott Hobson, S. N. G. Chu, L.M.F. Chirovsky, D.C Kilper, Fan Ren
Publikováno v:
Solid-State Electronics. 45:1639-1644
Results are presented on a lateral current injection vertical cavity surface emitting laser (VCSEL) structure, the implant apertured, index guided VCSEL (I 2 -VCSEL). This approach was previously used for 980 nm emission and has now been adapted for
Autor:
S. J. Pearton, K. P. Lee, J. Han, A. P. Zhang, J. W. Lee, Fan Ren, C. R. Abenathy, G. T. Dang, J. Lopata, William Scott Hobson
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 19:1846-1849
A self-aligned fabrication process for small emitter contact area (2×4 μm2) GaN/AlGaN heterojunction bipolar transistor is described. The process features dielectric-spacer sidewalls, low damage dry etching, and selected-area regrowth of GaAs(C) on
Autor:
Jung Han, G. T. Dang, John Lopata, J. W. Lee, A. P. Zhang, C. R. Abernathy, William Scott Hobson, Fan Ren, S. N. G. Chu, Stephen J. Pearton, K. P. Lee
Publikováno v:
Solid-State Electronics. 45:243-247
The development of a self-aligned fabrication process for small emitter contact area ( 2×4 μ m2) GaN/AlGaN heterojunction bipolar transistors and GaN bipolar junction transistors is described. The process features dielectric-spacer sidewalls, low d
Autor:
B. Luo, Peter Chow, Fan Ren, H. Cho, D.J King, J. M. Van Hove, J. J. Klaassen, G. T. Dang, William Scott Hobson, Stephen J. Pearton, A. P. Zhang, A. M. Wowchack, Xian-An Cao, John Lopata, C. J. Polley
Publikováno v:
Solid-State Electronics. 44:2097-2100
Low resistance ohmic contacts are difficult to form on p-type GaN and AlGaN due to the relatively high ionization energy of Mg in GaN and AlGaN. A carbon-doped GaAs grown on p-GaN prior to ohmic metallization has been shown to improve contact resista
Autor:
Randy J. Shul, K. B. Jung, Hyun Cho, Stephen J. Pearton, David C. Hays, Eric Lambers, William Scott Hobson, Y. B. Hahn, C. R. Abernathy
Publikováno v:
Plasma Chemistry and Plasma Processing. 20:405-415
High-density plasma etching of GaAs, GaSb, and AlGaAs was performed inICl/Ar and IBr/Ar chemistries using an Inductively Coupled Plasma (ICP)source. GaSb and AlGaAs showed maxima in their etch rates for both plamachemistries as a function of interhal
Autor:
Hyun Cho, David C. Hays, C. R. Abernathy, Stephen J. Pearton, Randy J. Shul, William Scott Hobson, Y. B. Hahn, Eric Lambers, K. B. Jung
Publikováno v:
Plasma Chemistry and Plasma Processing. 20:417-427
A parametric study of Inductively Coupled Plasma etching of InP, InSb, InGaP and InGaAs has been carried out in IC1/Ar and IBr/Ar chemistries. Etch rates in excess of 3.1 prrdmin for InP, 3.6 prnh-nin for InSb, 2.3 pm/min for InGaP and 2.2 ~rrdmin fo
Autor:
John Lopata, S. N. G. Chu, C. R. Abernathy, G. T. Dang, A. P. Zhang, S. M. Donovan, Robert G. Wilson, William Scott Hobson, Fan Ren, Stephen J. Pearton, Xian-An Cao
Publikováno v:
Solid-State Electronics. 44:105-109
Heavily carbon-doped (p≥10 10 cm −3 ) GaAs layers were grown on p-GaN in attempt to reduce the p-ohmic contact resistance. While the specific contact resistances on the p-GaN and p-GaAs were typical of the current state-of-the-art (∼10 −3 and
Autor:
Fan Ren, Y. B. Hahn, C. R. Abernathy, Hyun Cho, Stephen J. Pearton, William Scott Hobson, K. B. Jung, David C. Hays
Publikováno v:
Applied Surface Science. 147:125-133
Selective etching of GaAs over AlGaAs and InGaP was examined in different plasma chemistries (BCl3/SF6, BCl3/NF3, IBr, ICl, BI3, and BBr3) in a high density plasma reactor. The normal etch stop reactions involving formation of involatile AlF3, InF3,