Zobrazeno 1 - 4
of 4
pro vyhledávání: '"William L. DiMenna"'
Publikováno v:
Organic Photonic Materials and Devices VI.
A series of soluble, fully aromatic polyetherimides were prepared as candidate materials for optical coating applications. Most of the new polymer coatings possessed high transparency in the optical and near-infrared spectral regions at thicknesses r
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::eccc70a0bf520fc660e183cbea2b58e2
https://doi.org/10.1117/12.529576
https://doi.org/10.1117/12.529576
Autor:
Doug Holmes, William L. DiMenna, Jim D. Meador, Mariya Nagatkina, Tony D. Flaim, Randy Bennett, Ichiro Kobayashi, Michael D. Rich
Publikováno v:
Advances in Resist Technology and Processing XX.
This paper highlights the performance of new materials that have been developed for use in 193-nm trilayer microlithography. The products are embedded etch masking layers (EMLs) and bottom antireflective coatings (BARCs). Both coatings are spin appli
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::845eaf22a0d7c4005d0f2913b71aca87
https://doi.org/10.1117/12.485082
https://doi.org/10.1117/12.485082
Publikováno v:
Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications IV.
We are developing a set of dyed red, green, and blue color filter coatings for the fabrication of high resolution CCD and CMOS image sensor arrays. The resists contain photosensitive polymer binders and various curing agents, soluble organic dyes, an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b05078bdacf514ccd9ddb615f858e470
https://doi.org/10.1117/12.476750
https://doi.org/10.1117/12.476750
Autor:
William L. DiMenna, Mario J. Cazeca, Douglas J. Guerrero, Mary J. Spencer, Ram W. Sabnis, Min-Shyan Sheu
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 19:2184
A process of depositing thin organic polymeric coatings on electronic substrates by plasma enhanced chemical vapor deposition (PECVD) has been developed. We have designed halogenated compounds with PECVD reactive functionality attached to optically a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::10d1b697d8d296cda98facc787c2c953
https://doi.org/10.1116/1.1418402
https://doi.org/10.1116/1.1418402