Zobrazeno 1 - 10
of 62
pro vyhledávání: '"William G. Breiland"'
Autor:
William G. Breiland, Mary H. Crawford, Gerald Thaler, James Randall Creighton, Daniel D. Koleske
Publikováno v:
Journal of Crystal Growth. 310:1062-1068
We report a pyrometer that operates at a mid-infrared wavelength range (7–8 μm), where sapphire substrates are opaque and the reactant gases are transparent. The pyrometer also employs a novel “self-reflectance” method of emissivity correction
Publikováno v:
Journal of Crystal Growth. 261:204-213
Using in situ laser light scattering, we have observed gas-phase nanoparticles formed during AlN, GaN and InN OMVPE. The response of the scattering intensity to a wide range of conditions indicates that the AlN parasitic chemistry is considerably dif
Publikováno v:
DOE / OSTI
TBA (tert-butylarsine, H{sub 2}AsC(CH{sub 3}){sub 3}) has been demonstrated to be an effective arsenic precursor for the deposition of compound semiconductors such as GaAs by MOCVD (metal organic chemical vapor deposition). TBA is used as a liquid (b
Autor:
Michael E. Coltrin, Hong Q. Hou, Harry K. Moffat, J. Randall Creighton, Jeffrey Y. Tsao, William G. Breiland
Publikováno v:
Materials Science and Engineering: R: Reports. 24:241-274
Organometallic vapor phase epitaxy (OMVPE) has emerged in this past decade as a flexible and powerful epitaxial materials synthesis technology for a wide range of compound–semiconductor materials and devices. Despite its capabilities and rapidly gr
Publikováno v:
Journal of Crystal Growth. 195:199-204
In situ etching of GaAs with AsCl 3 in metalorganic vapor-phase epitaxy (MOVPE) reactor was studied with in situ reflectometry as a function of the AsCl 3 flow rate, substrate temperature, and AsH 3 flow rate during etching. A smooth and uniform etch
Publikováno v:
Journal of Crystal Growth. 195:181-186
The suitability of the wavelength range provided by silicon photodiode detector arrays for monitoring the spectral reflectance during epitaxial growth of GaSb, AlGaAsSb, and GaInAsSb, which have cutoff wavelengths at 25 degree C of 1.7, 1.2, and 2.3
Autor:
K. C. Baucom, William G. Breiland, B. E. Hammons, Robert M. Biefeld, Hong Q. Hou, R. A. Stall
Publikováno v:
Journal of Electronic Materials. 26:1178-1183
We present a comprehensive study on the growth of AlGaAs by using an alternative Al precursor, dimethylethylamine alane (DMEAA), and a Ga coprecursor, either triethylgallium (TEG) or trimethylgallium (TMG). The growth rate of AlAs determined by using
Publikováno v:
Journal of Crystal Growth. 174:564-571
In situ normal incidence reflectance, combined with a virtual interface model, is being used routinely on a commercial metal organic chemical vapor deposition reactor to measure growth rates of compound semiconductor films. The technique serves as a
High purity GaAs and AlGaAs grown using tertiarybutylarsine, trimethylaluminum, and trimethylgallium
Autor:
Thomas M. Brennan, K.H. Chang, H.C. Lee, B. E. Hammons, William G. Breiland, Robert M. Biefeld, Piotr Grodzinski, M.H. Kim, Eric D. Jones, H.C. Chui
Publikováno v:
Journal of Crystal Growth. 163:212-219
We have grown high purity AlGaAs by metalorganic chemical vapor deposition using tertiarybutylarsine (TBA), trimethylgallium, and trimethylaluminum. We have achieved p-type carrier concentrations less than 4 × 10 14 cm −3 and a mobility of 1015 cm
Autor:
A.G. Thompson, J. Hennessy, M. McKee, N.J. Bulitka, William G. Breiland, K. Moy, P. Esherick, E. Wolak, G.H. Evans, C.J.L. Moore, Peter A. Zawadzki, Alexander I. Gurary, Gary S. Tompa
Publikováno v:
Journal of Crystal Growth. 145:655-661
The optoelectronic and digital compound semiconductor electronics industry is a critical area of development for the 90's and into the next century. Optoelectronic devices are used in all aspects of communications (lasers and detectors) and displays