Zobrazeno 1 - 10
of 14
pro vyhledávání: '"William D. Bonivert"'
Autor:
Stewart K. Griffiths, Jill M. Hruby, William D. Bonivert, A. Ting, Robert H. Nilson, R.W. Bradshaw
Publikováno v:
Microsystem Technologies. 4:98-101
To better understand and to help optimize the electroforming portion of the LIGA process, we have developed one and two-dimensional numerical models describing electrode-position of metal into high aspect-ratio molds. The one-dimensional model addres
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::704f6202cd728ca686877febc7746844
https://doi.org/10.1007/s005420050105
https://doi.org/10.1007/s005420050105
Autor:
Thomas W. Kenny, Keith H. Jackson, T. D. Stowe, M. L. Scholz, Dean V. Wiberg, Michael H. Hecht, Steven Manion, Chantal G. Khan Malek, William D. Bonivert, R. A. Brennen, Jill M. Hruby
Publikováno v:
Microsystem Technologies. 3:91-96
We are fabricating sub-collimating X-ray grids that are to be used in an orbiting solar X-ray telescope. The telescope optics consist of twelve rotating pairs of high aspect ratio grids. The pitch for the grids ranges from 34 μm to 317 μm. The grid
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::443671e9a42ec104503d94ed14268f0e
https://doi.org/10.1007/s005420050062
https://doi.org/10.1007/s005420050062
Publikováno v:
Journal of Micromechanics and Microengineering. 6:228-235
The requirements for deep x-ray lithography (DXRL) masks are reviewed and a recently developed cost effective mask fabrication process is described. The review includes a summary of tabulated properties for materials used in the fabrication of DXRL m
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4c5fe4ef0e3f446d87b1da3b00f4cae7
https://doi.org/10.1088/0960-1317/6/2/004
https://doi.org/10.1088/0960-1317/6/2/004
Autor:
Alfredo M. Morales, D. M. Skala, Jill M. Hruby, Michelle A. Bankert, Stewart K. Griffiths, Dale R. Boehme, Linda A. Domeier, William D. Bonivert, A. Ting, John T. Hachman
Publikováno v:
SPIE Proceedings.
LIGA, an acronym from the German words for Lithography, Electroforming, and Molding, is being evaluated worldwide as a method to produce microparts from engineering materials. Much of the work to date in LIGA has focused on producing metal microparts
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::deb8ba2676533db9a7ce5b0566087a01
https://doi.org/10.1117/12.361216
https://doi.org/10.1117/12.361216
Autor:
Robert H. Nilson, William D. Bonivert, Dale R. Boehme, Barry V. Hess, Alfredo M. Morales, Stewart K. Griffiths, Jill M. Hruby, J.S. Krafcik
LIGA is a micromachining technology that uses high energy x-rays from a synchrotron to create patterns with small lateral dimensions in a deep, non-conducting polymeric resist. Typical dimensions for LIGA parts are microns to tens of microns in later
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::42b4e11abe246df5b1194a458d5664a0
https://doi.org/10.2172/5980
https://doi.org/10.2172/5980
Autor:
A. Ting, Robert H. Nilson, R.W. Bradshaw, Jill M. Hruby, John T. Hachman, Stewart K. Griffiths, William D. Bonivert
Publikováno v:
SPIE Proceedings.
To better understand and to help optimize the electroforming portion of the LIGA process, we have developed one and two- dimensional numerical models describing electrodeposition of metal into high aspect-ratio molds. The one-dimensional model addres
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::26df9077146d52eca8ec1f09fe1bf355
https://doi.org/10.1117/12.324324
https://doi.org/10.1117/12.324324
Autor:
John T. Hachman, Lawrence P. Murray, William D. Bonivert, T. H.J. Chang, Jill M. Hruby, Chantal Khan Malek, Keith H. Jackson
Publikováno v:
SPIE Proceedings.
We are currently investigating the fabrication of high precision, miniaturized, electrostatic deflectors for use in electron or ion beam micro-columns. These columns can be used in a broad array of applications including microscopy, spectroscopy and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::57911c651598b61560e0c23863a8b46b
https://doi.org/10.1117/12.222649
https://doi.org/10.1117/12.222649
Autor:
William D. Bonivert, T. D. Stowe, Thomas W. Kenny, Dean V. Wiberg, Steven Manion, Marcus L. Scholz, Chantal G. Khan Malek, Michael H. Hecht, Keith H. Jackson, Jill M. Hruby, Reid A. Brennen
Publikováno v:
SPIE Proceedings.
We are fabricating sub-collimating X-ray grids that are to be used in an instrument for the High Energy Solar Spectroscopic Imager (HESSI), a proposed NASA mission. The HESSI instrument consists of twelve rotating pairs of high aspect ratio, high Z g
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::28d2e6ea8483b99621f483ea14259e7d
https://doi.org/10.1117/12.222650
https://doi.org/10.1117/12.222650
Autor:
Reid A. Brennen, Jill M. Hruby, William D. Bonivert, Dean V. Wiberg, Michael H. Hecht, Ezekiel Kruglick, Steven Manion, Kristofer S. J. Pister
Publikováno v:
SPIE Proceedings.
We have developed fine pitch, sub-collimating X-ray grids for an instrument in the High Energy Solar Spectroscopic Imager (HESSI), a proposed NASA mission. In addition to high- energy X-rays, the instrument requires collimation of photons with energi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4a7f217c90ca5927fe26ce5f6c342c45
https://doi.org/10.1117/12.222651
https://doi.org/10.1117/12.222651
Autor:
Michael H. Hecht, Chantal Khan Malek, Reid A. Brennen, Dean V. Wiberg, Keith H. Jackson, William D. Bonivert, John T. Hachman, Jill M. Hruby
Publikováno v:
Review of Scientific Instruments. 67:3358-3358
Our objective is the fabrication of small high‐precision parts using LIGA, which can be used in a variety of industrial applications. LIGA is a combination of deep x‐ray lithography, electroplating, and replication processes that enables the fabr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ef76859a0132c6f7c145b864cb724233
https://doi.org/10.1063/1.1147383
https://doi.org/10.1063/1.1147383