Zobrazeno 1 - 10
of 14
pro vyhledávání: '"William C. McColgin"'
Publikováno v:
MRS Proceedings. 994
Dark current spectroscopy (DCS) is used to study deep level traps corresponding to the bright pixels that form the histogram “tails” of irradiated charge-coupled devices (CCD). We found four distinct traps, among which the double vacancy (V2) and
Publikováno v:
MRS Proceedings. 864
Today's CCD image sensors can provide very high image quality. However, used as a tool, they can also provide a sensitive window into defects in silicon, either intrinsic to the starting wafers or introduced during fabrication. In this paper, we exam
Publikováno v:
MRS Proceedings. 719
Defect engineering principles are integral to the design and manufacture of high-quality CCD image sensors. As examples, we describe the use of epitaxial silicon for defect control, hydrogen passivation of interface defects, and several forms of impu
Publikováno v:
MRS Proceedings. 510
We have extended by five the number of deep-level traps known to create dark current in charge-coupled device (CCD) image sensors. These include Mn, Pt, and three much weaker traps that are as yet unidentified. Using dark current spectroscopy (DCS) w
Publikováno v:
MRS Proceedings. 442
Dark current spectroscopy (DCS) is used to identify the signature of metals that generate dark or leakage current in silicon image sensors. Individual metal atoms or defects are detected by DCS on a pixel-by-pixel basis. DCS is applied here to show h
Publikováno v:
MRS Proceedings. 378
We have investigated the role of heavy metals in causing visible pixel defects in Charge Coupled Device (CCD) image sensors. Using a technique we call dark current spectroscopy, we can probe for deep-level traps in the active areas of completed image
Autor:
J. Kyan, David Newell Nichols, James P. Lavine, Charles V. Stancampiano, J. B. Russell, William C. McColgin
Publikováno v:
MRS Proceedings. 262
The effects of intentional metal contamination on silicon charge-coupled device imagers are reported. Such imagers are both sensitive to and provide sensitive measures of the presence of metals in the fabrication process. High-purity iron, cobalt, ni
Publikováno v:
Journal of the American Chemical Society. 100:5622-5626
Publikováno v:
Chemischer Informationsdienst. 9
Publikováno v:
SPIE Proceedings.
A new silylated resist process has been developed that provides the advantages of trilayer photoresist processing in a simpler bilayer format. In this new process, silicon for oxygen plasma etch resistance is added to a conventional photoresist layer