Zobrazeno 1 - 1
of 1
pro vyhledávání: '"William Braymer"'
Autor:
Ibrahim Abdulhalim, Yiping Xu, John A. Allgair, Piotr Zalicki, Michael Faeyrman, Lloyd C. Litt, Robert R. Hershey, Umar K. Whitney, David C. Benoit, John C. Robinson, William Braymer, Joel L. Seligson
Publikováno v:
SPIE Proceedings.
The continuing demand for higher frequency microprocessors and larger memory arrays has led to decreasing device dimensions and smaller process control windows. Decreasing process control windows have created a need for higher precision metrology to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::14685d5170748b6775f51ceb8d71af51
https://doi.org/10.1117/12.386465
https://doi.org/10.1117/12.386465
