Výsledky vyhledávání - "Willem-Jan H. Berghuis"

Excellent Passivation of n ‐Type Silicon Surfaces Enabled by Pulsed‐Flow Plasma‐Enhanced Chemical Vapor Deposition of Phosphorus Oxide Capped by Aluminum Oxide

Autor: Jimmy Melskens, Roel J. Theeuwes, Lachlan E. Black, Wilhelmus M. M. Kessels, Willem-Jan H. Berghuis, Bart Macco, Paula C. P. Bronsveld

Publikováno v: Physica Status Solidi : Rapid Research Letters, 15(1):2000399. Wiley-VCH Verlag

Phosphorus oxide (POx) capped by aluminum oxide (Al2O3), prepared by atomic layer deposition (ALD), has recently been introduced as a surface passivation scheme for planar n‐type FZ silicon. In this work, a fast pulsed‐flow plasma‐enhanced chem

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::15f491326292a018e5b53ab16915286b
https://doi.org/10.1002/pssr.202000399

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