Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Wilhelmus (Erwin) M. M. Kessels"'
Autor:
Johanna (Sanne) H. Deijkers, Arthur A. deJong, Miika J. Mattinen, Jeff J. P. M. Schulpen, Marcel A. Verheijen, Hessel Sprey, Jan Willem Maes, Wilhelmus (Erwin) M. M. Kessels, Ageeth A. Bol, Adriaan J. M. Mackus
Publikováno v:
Advanced Materials Interfaces, Vol 10, Iss 12, Pp n/a-n/a (2023)
Abstract Miniaturization in integrated circuits requires that the Cu diffusion barriers located in interconnects between the Cu metal line and the dielectric material should scale down. Replacing the conventional TaN with a 2D transition metal dichal
Externí odkaz:
https://doaj.org/article/cf0691abe86647728518a52e4199b94c
Autor:
René H J, Vervuurt, Bora, Karasulu, Marcel A, Verheijen, Wilhelmus Erwin M M, Kessels, Ageeth A, Bol
Publikováno v:
Chemistry of Materials
A novel method to form ultrathin, uniform Al2O3 layers on graphene using reversible hydrogen plasma functionalization followed by atomic layer deposition (ALD) is presented. ALD on pristine graphene is known to be a challenge due to the absence of da
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::b79af425388db9f7f376b86c778e9210
https://pubmed.ncbi.nlm.nih.gov/28405059
https://pubmed.ncbi.nlm.nih.gov/28405059
Publikováno v:
Nanotechnology; 10/7/2016, Vol. 27 Issue 40, p1-1, 1p