Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Wilfred Endendijk"'
Publikováno v:
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).
In this paper, the implementation of a controllable MEMS-micromirror into the illumination system of an ASML lithography scanner is described. Being the industry's technology leader, ASML is keen on implementing new technology to improve lithography
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9d9fd0266d36cf4cf816fd79bbb0d024
https://doi.org/10.1109/transducers.2013.6627329
https://doi.org/10.1109/transducers.2013.6627329
Autor:
Joost Bekaert, Dirk Jürgens, Gert Streutker, Wilfred Endendijk, J. Verbeeck, Robert John Socha, Andre Engelen, Bert van Drieenhuizen, Daniel Corliss, Melchior Mulder, Anita Bouma, Cas Johannes Petrus Maria Van Nuenen, Greg McIntyre, Bastian Trauter, Oscar Noordman, Joerg Zimmermann, Robert Kazinczi, Bart Laenens, Wim Bouman
Publikováno v:
SPIE Proceedings.
This paper describes the principle and performance of FlexRay, a fully programmable illuminator for high NA immersion systems. Sources can be generated on demand, by manipulating an array of mirrors instead of the traditional way of inserting optical
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::156a83ca3e2ac3da0d5d3302a3f396f2
https://doi.org/10.1117/12.845984
https://doi.org/10.1117/12.845984