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Autor:
Jae-Hyun Kang, Ya-Chieh Lai, Kee Sup Kim, Hungbok Choi, Wilbur Luo, Daehyun Jang, Junsu Jeon, Seung Weon Paek, Naya Ha, Philippe Hurat
Publikováno v:
Design for Manufacturability through Design-Process Integration VI.
As patterning for advanced processes becomes more challenging, designs must become more process-aware. The conventional approach of running lithography simulation on designs to detect process hotspots is prohibitive in terms of runtime for designers,