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Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 8:968-971
Small, open ended, parylene cylinders of 150 μm diameter, 250 μm length and 10 μm wall thickness are manufactured and filled with solutions of acrylate monomers which are polymerised in situ with uv light to produce gels. These gels are then preci