Výsledky vyhledávání - "Wheeler, Donald C."

Conference

Subwavelength alignment mark signal analysis of advanced memory products.

Autor: Yin, Xiaoming, Wong, Alfred K. K., Wheeler, Donald C., Williams, Gary, Lehner, Eric A., Zach, Franz X., Kim, Byeong Y., Fukuzaki, Yuzo, Lu, Zhijian G., Credendino, Santo, Wiltshire, Timothy J.

Publikováno v: Proceedings of SPIE; Nov2000 Part 2, Issue 1, p449-459, 11p

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Conference

Method to budget and optimize total device overlay.

Autor: Progler, Christopher J., Bukofsky, Scott J., Wheeler, Donald C.

Publikováno v: Proceedings of SPIE; Nov1999, Issue 1, p193-207, 15p

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Conference

Optical lens specifications from the user's perspective.

Autor: Progler, Christopher J., Wheeler, Donald C.

Publikováno v: Proceedings of SPIE; Nov1998 Part 2, Issue 1, p256-268, 13p

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Conference

Characterization of a next-generation step-and-scan system.

Autor: Wiltshire, Timothy J., Kirk, Joseph P., Wheeler, Donald C., Obszarny, Christopher, Marsh, James T., Odiwo, Donald M.

Publikováno v: Proceedings of SPIE; Nov1998 Part 2, Issue 1, p448-459, 12p

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Conference

Phase-shift focus monitor applications to lithography tool control.

Autor: Wheeler, Donald C., Solecky, Eric P., Dinh, T., Mih, Rebecca D.

Publikováno v: Proceedings of SPIE; Nov1997, Issue 1, p225-233, 9p

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Conference

Challenge of 1-Gb DRAM development when using optical lithography.

Autor: Farrell, Timothy R., Nunes, Ronald, Samuels, Donald J., Thomas, Alan C., Ferguson, Richard A., Molless, Antoinette F., Wong, Alfred K. K., Conley, Will, Wheeler, Donald C., Credendino, Santo, Naeem, Munir, Hoh, Peter, Lu, Zhijian G.

Publikováno v: Proceedings of SPIE; Nov1997, Issue 1, p333-341, 9p

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