A sensitive optical micro-machined ultrasound sensor (OMUS) based on a silicon photonic ring resonator on an acoustical membrane.

Autor: Leinders SM; Lab. of Acoustical Wavefield Imaging, Department of Imaging Physics, Delft University of Technology, P.O.Box 5046, 2600 GA Delft, the Netherlands., Westerveld WJ; Optics Research Group, Department of Imaging Physics, Delft University of Technology, P.O.Box 5046, 2600 GA Delft, the Netherlands.; Technical Sciences, TNO, P.O.Box 6000, 2600 JA Delft, the Netherlands., Pozo J; Technical Sciences, TNO, P.O.Box 6000, 2600 JA Delft, the Netherlands., van Neer PL; Technical Sciences, TNO, P.O.Box 6000, 2600 JA Delft, the Netherlands., Snyder B; Tyndall National Institute, Photonics Building, Lee Maltings, Cork, Ireland., O'Brien P; Tyndall National Institute, Photonics Building, Lee Maltings, Cork, Ireland., Urbach HP; Optics Research Group, Department of Imaging Physics, Delft University of Technology, P.O.Box 5046, 2600 GA Delft, the Netherlands., de Jong N; Lab. of Acoustical Wavefield Imaging, Department of Imaging Physics, Delft University of Technology, P.O.Box 5046, 2600 GA Delft, the Netherlands.; Department of Biomedical Engineering, Erasmus Medical Center, P.O. Box 2040, 3000 CA Rotterdam, the Netherlands., Verweij MD; Lab. of Acoustical Wavefield Imaging, Department of Imaging Physics, Delft University of Technology, P.O.Box 5046, 2600 GA Delft, the Netherlands.

Publikováno v: Scientific reports [Sci Rep] 2015 Sep 22; Vol. 5, pp. 14328. Date of Electronic Publication: 2015 Sep 22.