Zobrazeno 1 - 10
of 12
pro vyhledávání: '"Werner Langheinrich"'
Publikováno v:
Mechatronics. 12:1023-1033
This paper describes a micromechanical sensor for contactless detection of torque at rotating shafts. The sensor consists of a silicon chip and uses a magnetoelastic principle for measurement. A closed magnetic loop is formed by the sensor chip and a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::87f1d163e1efd9e781d7cb3a02bffdec
https://doi.org/10.1016/s0957-4158(02)00010-7
https://doi.org/10.1016/s0957-4158(02)00010-7
Publikováno v:
Sensors and Actuators A: Physical. 100:199-205
This paper analyzes a solid state magnetic sensor called the “sheer-contact magnetic field sensitive resistor” (SC-MAGRES). The geometry of this device features no lateral insulation and is determined by the contacts only, thus, it can be manufac
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4a65decc48f137a282c63085a74df9ee
https://doi.org/10.1016/s0924-4247(02)00095-x
https://doi.org/10.1016/s0924-4247(02)00095-x
Autor:
Werner Langheinrich, J.W.A. von Kluge
Publikováno v:
IEEE Transactions on Electron Devices. 46:89-95
An analytical model of the sensitivity of magnetic field-effect transistors (MAGFET's) is presented. The model includes secondary and parasitic geometric effects as well as operating point dependencies. In order to get a continuous mathematical descr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::eafdb76c270cf32e0d88d5d478d5a400
https://doi.org/10.1109/16.737446
https://doi.org/10.1109/16.737446
Publikováno v:
Sensors and Actuators A: Physical. 61:346-351
The characteristics of magnetic field-sensitive split-drain MOSFETs (MAGFETs) have been experimentally measured. The sensitivity depends on the geometry and the operating point of the MAGFET. Particular attention is paid to the lateral parasitic cond
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::75f8e80039d072b11f6196a8c0b0a0d4
https://doi.org/10.1016/s0924-4247(97)80286-5
https://doi.org/10.1016/s0924-4247(97)80286-5
Autor:
Werner Langheinrich, Dirk Killat
Publikováno v:
Sensors and Actuators A: Physical. 46:315-319
A novel type of signal processing for a magnetic micro torque sensor is described and simulated. The sensor principles are based on a soft magnetic core shaped as a yoke, two current-carrying coils, a soft magnetic amorphous ribbon with strong magnet
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f351b9a3b0ddded178b547ef21e85d14
https://doi.org/10.1016/0924-4247(94)00913-3
https://doi.org/10.1016/0924-4247(94)00913-3
Autor:
Werner Langheinrich, Pirmin Rombach
Publikováno v:
Sensors and Actuators A: Physical. 46:294-297
A micromachined torque sensor head is presented. The torque is evaluated by using an amorphous ribbon fixed on a shaft and an NiFe yoke with exciting coils and CMOS MAGFETs underneath the pole pieces to detect the change in magnetic flux density caus
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::104e08337aa89a1af8e7cf5bb49781d2
https://doi.org/10.1016/0924-4247(94)00908-z
https://doi.org/10.1016/0924-4247(94)00908-z
Autor:
Pirmin Rombach, Werner Langheinrich
Publikováno v:
Sensors and Actuators A: Physical. 42:410-416
An integrated micromachined torque sensor head in silicon for contactless detection of torque and force is described. It is based on a magnetic yoke with an exciting and a receiving coil that detects the change of permeability of a rotating shaft and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fbe30d05558e89ee36a17b3e6ff8ddde
https://doi.org/10.1016/0924-4247(94)80023-5
https://doi.org/10.1016/0924-4247(94)80023-5
Publikováno v:
Sensors and Actuators A: Physical. 36:227-231
R.f. plasma oxidation of silicon in the reactive ion etching (RIE) mode is investigated as a pretreatment for silicon direct bonding (SDB). An ‘active oxide’ is formed on the surface, which can be wetted by water rinsing. The result is good adhes
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1e98eccb26af5cd24e0301377b25c331
https://doi.org/10.1016/0924-4247(93)80197-o
https://doi.org/10.1016/0924-4247(93)80197-o
Publikováno v:
Sensors and Actuators A: Physical. 60:37-39
Microsystems are on their way out of laboratories into production. One of these microsystems, a piezoresistive pressure sensor developed by Robert Bosch GmbH, is examined within this paper. Obviously, one can detect undesirable temperature effects re
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7cc8df197ace404d9bd432b89f68144d
https://doi.org/10.1016/s0924-4247(96)01419-7
https://doi.org/10.1016/s0924-4247(96)01419-7
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