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Publikováno v:
IEEE/LEOS International Conference on Optical MEMs.
Angular motion plays a crucial role in optical applications such as switching and scanning. The angular motion is available using electrostatic actuation such as parallel plate, lateral comb, and vertical comb. Among them the vertical comb actuator (
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0841dc4e4d08e65fb932b820631ca948
https://doi.org/10.1109/omems.2002.1031479
https://doi.org/10.1109/omems.2002.1031479
Publikováno v:
IEEE/LEOS International Conference on Optical MEMs; 2002, p133-134, 2p