Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Weileum Fang"'
Autor:
Jung‐Hung Wen, Weileum Fang
Publikováno v:
Micro & Nano Letters, Vol 16, Iss 12, Pp 567-572 (2021)
Abstract This work proposed a pure‐metal, single‐proof‐mass structure fabricated by the standard 0.18 μm one‐poly‐silicon six‐metal (1P6M) CMOS process along with one in‐house post‐CMOS wet‐etching approach. The implemented state
Externí odkaz:
https://doaj.org/article/be6a1459277f42ae8d112af06ad2ff7e
The papers presented here were initial presented at the IEEE International Workshop on Advances in Sensors and Interfaces 2011 (IWASI-2011), held June 28-29, 2011 in Savelletri di Fasano (Brindisi), Italy. The 14 papers in this special issue were cho
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f49e6d883a4274a475704dd6d0008aa2
http://hdl.handle.net/11589/88352
http://hdl.handle.net/11589/88352
