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Publikováno v:
2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings.
A lumped behavioral model of suspended MEMS is presented in the paper. Suspended MEMS device is decomposed into many basal components, each of which is modeled using the relative movement theory and energy method, and its parameterized model coded in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::787fc71ea13c9d40123718b79e196b63
https://doi.org/10.1109/icsict.2006.306435
https://doi.org/10.1109/icsict.2006.306435
