High-resolution electron-beam induced deposition.

Autor: Koops, H. W. P., Weiel, R., Kern, D. P., Baum, T. H.

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1988, Vol. 6 Issue 1, p477-481, 5p

Fabrication of multi electrode array structures for intra-neural stimulation: assessment of the LIGA method.

Autor: Bielen, J.A., Schmidt, A.W., Weiel, R., Rutten, W.L.C.

Publikováno v: Proceedings of 18th Annual International Conference of the IEEE Engineering in Medicine & Biology Society; 1996, Issue 1, p268-268, 1p