Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Wei-Zen Kang"'
Publikováno v:
Surface Topography: Metrology and Properties. 11:014011
In this study, the Taguchi design of experiment (DOE) was performed to optimize the deposition process of MoNx thin films using unbalanced magnetron sputtering (UBMS). Further single-variable experiments based on the sensitive parameter derived from
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e237d5dbb3d23f2460e7bcea9ae4420a
https://doi.org/10.1088/2051-672x/acc088
https://doi.org/10.1088/2051-672x/acc088
Processing, structure and properties of reactively sputtered films of titanium dioxide and suboxides
Publikováno v:
Thin Solid Films. 688:137351
A series of TiOx(0 O) solid solution, TiO, Ti2O3, Magneli phases, rutile and anatase TiO2. With increasing the temperature, the crystallinity, and oxygen content of the films varied, which resulted in changes in film properties. The trend of hardness
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::683e5eb7a9667e6a1420ceb9cd1b3411
https://doi.org/10.1016/j.tsf.2019.06.001
https://doi.org/10.1016/j.tsf.2019.06.001