Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Wei-Jhih Mao"'
Publikováno v:
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
This study exploits the CMOS-MEMS technology to demonstrate a condenser microphone without back-plate. The reference sensing electrodes are fixed to the substrate, and thus no back-plate is required. To reduce the unwanted deformations resulted from
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::407d8516c9fa07070506ddb345bafb16
https://doi.org/10.1109/transducers.2017.7994229
https://doi.org/10.1109/transducers.2017.7994229
Publikováno v:
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).
This study presents the world first post-CMOS 3-axis accelerometer to meet the commercial specifications using the 0.18μm standard CMOS process and one-step vapor HF post CMOS process. The novel pure-metal hollow springs and high stiffness proof-mas
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b267a414a8373b3a8d72112001d88d0f
https://doi.org/10.1109/memsys.2016.7421802
https://doi.org/10.1109/memsys.2016.7421802