Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Wei-Hsin Chein"'
Publikováno v:
Metrology, Inspection, and Process Control XXXVII.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::30e694fd98ef22cfd753d7bc5d437a89
https://doi.org/10.1117/12.2657642
https://doi.org/10.1117/12.2657642
Publikováno v:
Optics and Lasers in Engineering. 166:107563
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::077d405431d4d0abe2fc98613d4d5712
https://doi.org/10.1016/j.optlaseng.2023.107563
https://doi.org/10.1016/j.optlaseng.2023.107563
Publikováno v:
Surface Topography: Metrology and Properties. 11:024004
This article presents an innovative model-based scatterometry method for CD metrology of single high-aspect-ratio (HAR) microstructures, which are increasingly utilized in advanced packaging, especially as vertical interconnects in three-dimensional
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e95a994d9e7ef56d8ae48cc7a4d3b50f
https://doi.org/10.1088/2051-672x/acd0c5
https://doi.org/10.1088/2051-672x/acd0c5
Publikováno v:
Optics and Photonics for Advanced Dimensional Metrology II.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8ed3a188f0eb5fb48e3113992e1ebb75
https://doi.org/10.1117/12.2621895
https://doi.org/10.1117/12.2621895
This book presents a unique methodology of precious and original scientific work in optical microscopy that is scarce to be found elsewhere. It covers modern 3D optical microscopy to provide a solid understanding of microscopic optics and imaging the
