Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Wei Xuan Jing"'
Publikováno v:
Applied Mechanics and Materials. 870:114-119
In this paper, nanosteps were fabricated by a new method. This method used the energy of focus imaging of focused ion beam to peel the material surface for fabricating the nanosteps. By changing the number of focus imaging can get different deepness
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4c05335c3d8244010328a59f783f3355
https://doi.org/10.4028/www.scientific.net/amm.870.114
https://doi.org/10.4028/www.scientific.net/amm.870.114
Publikováno v:
Key Engineering Materials. 437:45-50
Motif parameters were introduced to characterize line edge roughness (LER) of a nanoscale grating structure. Firstly with electron beam lithography employed the expected nano-scale grating structure with linewidth of 16 nm was fabricated on positive
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ca22b2c6fb817b9b9decf2ef006160e0
https://doi.org/10.4028/www.scientific.net/kem.437.45
https://doi.org/10.4028/www.scientific.net/kem.437.45
Publikováno v:
2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems.
In order to measure the microcosmic profiles of ultra-smooth surfaces, a high-accuracy noncontact micro-Coordinate Measuring Machine (micro-Coordinate Measuring Machine, micro-CMM) is developed in this paper. The working table of this measurement dev
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0a83aa0a5556c62c2b5663848698b061
https://doi.org/10.1115/micronano2008-70242
https://doi.org/10.1115/micronano2008-70242
Publikováno v:
2006 1st IEEE International Conference on Nano/Micro Engineered & Molecular Systems; 2006, p1194-1197, 4p