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Influence of the methyl group on the dielectric constant of boron carbon nitride films containing it
Autor:
Aoki, Hidemitsu, Masuzumi, Takuro, Hara, Makoto, Lu, Zhiming, Watanebe, Daisuke, Kimura, Chiharu, Sugino, Takashi
Publikováno v:
In Diamond & Related Materials 2010 19(12):1437-1440
