Focused electron beam induced etching of silicon by chlorine gas: Negative effects of residual gas contamination on the etching process.

Autor: Roediger, P., Wanzenboeck, H. D., Hochleitner, G., Bertagnolli, E., Buehler, W.

Publikováno v: Journal of Applied Physics; Dec2010, Vol. 108 Issue 12, p124316, 8p, 1 Diagram, 6 Graphs

Optimized plasma-assisted bi-layer photoresist fabrication protocol for high resolution microfabrication of thin-film metal electrodes on porous polymer membranes.

Autor: Schuller P; Institute of Applied Synthetic Chemistry and Institute of Chemical Technologies and Analytics, Vienna University of Technology, Vienna, Austria.; Institute of Solid-State Electronics, Vienna University of Technology, Vienna, Austria., Rothbauer M; Institute of Applied Synthetic Chemistry and Institute of Chemical Technologies and Analytics, Vienna University of Technology, Vienna, Austria., Eilenberger C; Institute of Applied Synthetic Chemistry and Institute of Chemical Technologies and Analytics, Vienna University of Technology, Vienna, Austria., Kratz SRA; Institute of Applied Synthetic Chemistry and Institute of Chemical Technologies and Analytics, Vienna University of Technology, Vienna, Austria., Höll G; Institute of Applied Synthetic Chemistry and Institute of Chemical Technologies and Analytics, Vienna University of Technology, Vienna, Austria., Taus P; Institute of Solid-State Electronics, Vienna University of Technology, Vienna, Austria., Schinnerl M; Institute of Solid-State Electronics, Vienna University of Technology, Vienna, Austria., Genser J; Institute of Solid-State Electronics, Vienna University of Technology, Vienna, Austria., Ertl P; Institute of Applied Synthetic Chemistry and Institute of Chemical Technologies and Analytics, Vienna University of Technology, Vienna, Austria., Wanzenboeck H; Institute of Solid-State Electronics, Vienna University of Technology, Vienna, Austria.

Publikováno v: MethodsX [MethodsX] 2019 Nov 09; Vol. 6, pp. 2606-2613. Date of Electronic Publication: 2019 Nov 09 (Print Publication: 2019).

Effects of Ga-Irradiation On Properties of Materials Processed by a Focused Ion Beam (FIB).

Autor: Wanzenboeck, H. D., Langfischer, H., Lugstein, A., Bertagnolli, E., Grabner, U., Pongratz, P., Basnar, B., Smoliner, J., Gornik, E.

Publikováno v: MRS Online Proceedings Library; 2000, Vol. 647 Issue 1, p1-9, 9p

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