Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Walter Lee Smith"'
Publikováno v:
SPIE Proceedings.
Real-time optical CD metrology(1), employing fast numerical solutions to the diffraction of light from microelectronic features, is beginning to gain wide usage for sub-130nm IC processing. Applications of this method heretofore have concentrated on
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2200ec08371d97a86e0ab403619c3ed1
https://doi.org/10.1117/12.487605
https://doi.org/10.1117/12.487605
Autor:
Yu-Han Bae, Wee-Sup Chung, Yeong-Keun Kwon, L.A. Larson, Tohru Hara, Hidenori Suzuki, Charles B. Yarling, Hiroyuki Hagiwara, Richard Meinecke, Walter Lee Smith, Kwang Il Kim, Sookap Hahn
Publikováno v:
SPIE Proceedings.
In this study, damage induced by Ar+ and Si+ ion implantation and its annealing behavior during rapid thermal annealing for 10 sec at temperatures between 575-1100°C were investigated by thermal wave modulated optical reflectance, deep level transie
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::12fd2193eec43ae01c3f06cc561b23ff
https://doi.org/10.1117/12.56670
https://doi.org/10.1117/12.56670
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 21:537-541
Thermal wave technology has led to a new means of monitoring the dose and dose uniformity of ions implanted into wafers of silicon and gallium arsenide. New monitoring characteristics made available with this technique include nondestructive real-tim
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ac7aa30d268d9b6e6be0889d60071578
https://doi.org/10.1016/0168-583x(87)90899-8
https://doi.org/10.1016/0168-583x(87)90899-8
Publikováno v:
Journal of Applied Physics. 59:1392-1394
We show that variations in local optical constants induced by the presence of thermal waves can be used for thermal wave detection and analysis through measurements of thermal wave‐induced modulated transmittance and scattering.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::102f3886934d37234adf27c30053c047
https://doi.org/10.1063/1.336486
https://doi.org/10.1063/1.336486
Publikováno v:
Applied Physics Letters. 46:1013-1015
We show that thermal wave detection and analysis can be performed, in a noncontact and highly sensitive manner, through the dependence of sample optical reflectance on temperature. Applications to the study of microelectronic materials are illustrate
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e777245a13a7eac6dcb944941e35c631
https://doi.org/10.1063/1.95794
https://doi.org/10.1063/1.95794
Publikováno v:
Review of Progress in Quantitative Nondestructive Evaluation ISBN: 9781461280972
Thermal wave technology has proven to be a very effective means for investigating the near surface region of several different materials. Although there are many methods for generating and detecting thermal waves the most desirable for quantitative N
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0b6e32b75f5a6dce9fb0b3aa8684b68e
https://doi.org/10.1007/978-1-4613-0817-1_149
https://doi.org/10.1007/978-1-4613-0817-1_149
Publikováno v:
Photoacoustic and Photothermal Phenomena ISBN: 9783662137055
In modulated reflectance experiments on silicon wafers the signal arises primarily from the Drude modulation of the silicon refractive index from the laser generated electron-hole plasma density [1,2]. We have recently found that both the magnitude a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a5d03f00c0cc8f8099208fd7aadd3ea2
https://doi.org/10.1007/978-3-540-48181-2_59
https://doi.org/10.1007/978-3-540-48181-2_59
Publikováno v:
Applied Physics Letters. 49:301-301
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e3c9912b043e51de1455a10d15e83b79
https://doi.org/10.1063/1.97148
https://doi.org/10.1063/1.97148